用sol-gel法在不锈钢基片上制备TiO_2薄膜  

Thin film on stainless substrate by sol gel process.

作　　者：刘世军[1] 王培英[1] 

机构地区：[1]华中理工大学,湖北武汉430074

出　　处：《电子元件与材料》1999年第6期5-6,共2页Electronic Components And Materials

摘　　要：介绍利用钛酸丁酯为前驱液， 用ｓｏｌ－ｇｅｌ法在不锈钢基片上制备ＴｉＯ２ 薄膜。研究分析了冰醋酸、乙酰丙酮等添加物对溶胶性能的影响，对制备在不锈钢基片上的ＴｉＯ２ 薄膜进行ＸＲＤ分析，并检测薄膜的阻－温特性、Ｖ－Ｉ特性、绝缘强度等电学特性。实验显示添加一定比例的Ｈ２Ｏ、冰醋酸、乙酰丙酮， 可以得到长时间不胶凝、性能稳定的溶胶，通过适当工艺， 能在金属基片上制备出致密、不开裂、电阻率为１０５ ～１０６ Ω·ｃｍ 的ＴｉＯ２ 薄膜。ELECTRONIC COMPONENTS & MATERIALS (China), Vol 18, No 6, P 5 6 (Dec 1999) In Chinese TiO 2 thin film are prepared on stainless steel substrate by sol gel process with Ti(OBu) 4 as alkoxide precursor. The effects of chemical additives, such as H 2O, acetic acid and acetylacetone, on properties of TiO 2 sol are investigated. TiO 2 thin film on stainless steel substrate is analyzed by XRD. the electricity properties of film are examined . It is shown that a sol of long time gelation and good stability can be obtained by adding suitable chemical additives. Densified and nonflaw TiO 2 thin film can be obtained by adjusting the annealing process. (5 refs.)

关 键 词：二氧化钛薄膜 不锈钢基片 SOL-GEL法 功能材料 

分 类 号：TM28[一般工业技术—材料科学与工程]