辉光放电聚合物结构及力学性质研究  

Structure and mechanical property of glow discharge polymer

作　　者：何智兵[1] 阳志林[1,2] 闫建成[1] 宋之敏[2] 卢铁城[2] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,绵阳621900 [2]四川大学物理科学与技术学院,成都610065

出　　处：《物理学报》2011年第8期538-543,共6页Acta Physica Sinica

摘　　要：采用低压等离子体聚合技术,通过调整工作气压和反式二丁烯(T2B)与H2流量比制备了辉光放电聚合物(GDP)涂层.利用傅里叶变换红外吸收光谱和元素分析法讨论了工作气压和T2B与H2流量比对GDP涂层内部H原子含量及结构的影响,并且通过纳米压痕技术对GDP涂层的硬度及杨氏模量进行了表征.研究结果表明:降低工作气压和T2B与H2流量比,GDP涂层内sp3CH3基团与H原子含量随之逐渐降低,sp2CH2基团、sp3CH2基团和sp3CH基团含量随之增加,涂层的网络结构交联化程度增强,硬度和杨氏模量增大.Different glow discharge polymer （GDP） thin-films are prepared at various working pressures and flux ratios of trans-2-butune （T2B） to H2 by using low-pressure plasma enhanced chemical vapor deposition technology.Hydrogen atomic content and network structure of GDP thin-film are characterized by element analysis and Fourier transform infrared spectrum.The hardness and modulus of GDP coating are measured by nanoindentation.It is found that when working pressure and flux ratio between T2B and H2 gradually decrease,hydrogen content and sp3 CH3 groups decrease,sp2 CH2 and sp3 CH1,2 groups increase and hardness H and Young＇s modulus E of GDP coating and the cross-linking degree of carbon network inerease.

关 键 词：傅里叶变换红外光谱 纳米压痕 杨氏模量 硬度 

分 类 号：O631.21[理学—高分子化学]