微尺度射流流量计的设计与仿真研究  

Design and simulation research of microscale fluidic flowmeter

作　　者：程宁[1] 谢代梁[1] 

机构地区：[1]中国计量学院计量测试工程学院,浙江杭州310018

出　　处：《传感器与微系统》2011年第8期70-72,76,共4页Transducer and Microsystem Technologies

基　　金：浙江省自然科学基金资金项目(Y1091152);国家自然科学基金资助项目(11002137)

摘　　要：MEMS流量控制系统中,需要微型化的流量传感器,设计了一种反馈流驱动的微尺度射流流量计。采用数值模拟的方法对微尺度射流流量计进行研究,CFD软件的仿真结果表明:在较宽入口速度范围内该微尺度射流流量计起振快,振荡稳定,切换灵敏,斯特劳哈尔数基本恒定,并且流速测量下限可以达到0.075m/s,在一定程度上为射流流量计的微型化和微尺度射流流量计的设计与优化提供了依据。A feedback-driven microscale fluidic flowmeter is designed for the need of the miniaturization of flow sensors in the MEMS flow control system.Numerical simulation method is employed to study the measurement characteristics of this microscale fluidic flowmeter.The simulation results using CFD software show that this micro scale fluidic flowmeter is able to oscillate within a very short time,oscillation is stable,switch is sensitive and the Strouhal number is almost a constant in a wide range of the inlet velocity of this flowmeter,especially the initial oscillation velocity is down to a small flow rate 0.075m/s.The attempt in this work may provide some useful information for design and optimization of the microscale fluidic flowmeter.

关 键 词：射流流量计 微尺度 仿真 流量 CFD 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP613[自动化与计算机技术—控制科学与工程]