运动轨迹对抛光误差的影响分析和轨迹优化研究  

Analysis of Polishing Errors by Tool Paths and Optimization of Tool Paths

作　　者：施春燕[1,2] 袁家虎[1] 伍凡[1] 万勇建[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院研究生院,北京100049

出　　处：《光学学报》2011年第8期252-256,共5页Acta Optica Sinica

基　　金：国家自然科学基金(60808017)资助课题

摘　　要：针对现有光学加工抛光头运动方式由于光栅形或螺旋形等对称扫描方式带来的运动轨迹间的迭代误差,提出随机轨迹抛光运动方式。随机轨迹方法通过随机轨迹算法随机生成镜面离散点的抛光顺序和抛光轨迹,采用随机轨迹驻留时间补偿方法控制镜面离散点的驻留时间,对各个点进行相应大小的材料去除。实验结果显示,随机轨迹方法产生的抛光运动轨迹表现为混乱分布,从而把运动轨迹间的迭代误差均匀分布在整个镜面上,与规则运动轨迹方式相比降低了轨迹误差分布。To solve the problem that the inerratic tool paths will bring the iterative errors between path and path to polished optical components, a new polishing tool path which is named random tool path is proposed. The way of random tool path polishing is carried out as follows. Firstly, the orders of polishing positions and polishing paths are created by random tool path algorithm after the polishing positions of optical components are discretized. Secondly, the dwell times can be figured out from error distributions and material removal function. However, the actual dwell times are not the calculated values because the random polishing paths will affect the dwell times when each path scans through some polishing positions. So the next step is that the actual dwell times are computed by the offset method, and numerical control codes are produced with actual dwell times. Finally, the polishing process is performed in numerical control polishing machine. The experimental results show that the way of random tool path is disordered, and the disorder can make the iterative errors between path and path distribute equally, which can reduce the error on optical mirrors and improve the roughness.

关 键 词：光学加工 射流抛光 运动轨迹 抛光误差 随机轨迹 

分 类 号：TH74[机械工程—光学工程] TP60[机械工程—仪器科学与技术]