氮化硅陶瓷表面DLC膜的高温摩擦学性能  

Friction Characteristics of DLC Films on the Silicon Nitride Ceramic Surfaces at High Temperature Conditions

作　　者：卓会丹[1] 宋宝玉[1] 古乐[1] 

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001

出　　处：《中国表面工程》2011年第4期47-50,F0003,共5页China Surface Engineering

基　　金：国家自然科学基金(50875058);国家"973"计划基金(2007CB607602)

摘　　要：利用离子注入与沉积工艺在氮化硅陶瓷盘表面制备了厚约500 nm的类金刚石碳膜(DLC膜)。采用有限元模型模拟计算了DLC膜的热应力,分析了不同工作温度下薄膜热应力的大小和分布;利用高温球盘摩擦试验机考察了陶瓷盘表面DLC膜的摩擦磨损特性;将表面沉积DLC膜的氮化硅陶瓷球经历不同温度循环后分别装入满装角接触轴承,测试了轴承的滚动摩擦力矩。试验结果表明:在常温到350℃范围内,氮化硅陶瓷表面的DLC膜可降低滑动摩擦因数和轴承的滚动摩擦力矩值,但随着温度的升高,DLC膜的磨损寿命变短。在经历400℃热循环后,陶瓷表面DLC膜在热应力和机械力的共同作用下起皱、脱落,配副摩擦恢复到未镀膜水平。Based on the ion plantation and deposition technology, diamond like carbon （DCL） films about 500 nm thicknesses were prepared on the surface of silicon nitride ceramics. The finite element modeling method was used to simulate the thermal stress between DCL film and the ceramic substrate. Their sliding friction properties were investigated on high -temperature ball-on-disk friction tester. Rolling friction torque of full-ball angle contact bearings filled with ceramic balls deposited DLC films and experienced different temperature loops were tested. The results show that the DLC films on silicon nitride surfaces can lower the sliding and rolling friction ranging from room temperature to 350 ~C. The wear duration lives of DLC films get shorter with the rising of temperature. DLC films wrinkle and fall off from the ceramic basis after the temperature circulation to 400 ℃ because of the combined function of the thermal and mechanical stress. Their frictional characteristics return to normal level of uncoated pairs.

关 键 词：滚动摩擦 高温 DLC膜 陶瓷 

分 类 号：TG115.58[金属学及工艺—物理冶金]