基于ANSYS的压电微悬臂双梁的有限元分析  

The Finite Element Analysis of Twin Piezoelectric Micro Cantilever Based on ANSYS

作　　者：缪建[1] 朱若谷[1] 

机构地区：[1]中国计量学院计量测试工程学院,浙江杭州310018

出　　处：《压电与声光》2011年第4期557-560,565,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50675214)

摘　　要：提出一种新型的对偶子式的压电微悬臂双梁,采用简化的等效器件建立数学分析模型,利用ANSYS对这种对偶子微悬臂梁进行模拟仿真分析,得出微悬臂梁的振型、固有频率及其在受外加负载时的形变和电压输出。同时分析微悬臂梁的几何尺寸对它们的影响,以便更好地指导实际工艺。A new type of twin piezoelectric micro-cantilever was proposed in this paper and the mathematical model was established based on the simplified equivalent device. The simulation analysis of the dual micro cantilever was carried out by using ANSYS. The vibration mode and inherent frequency of the cantilever, the deformation caused by the applied loads as well as the voltage output were given in this paper. Meanwhile, in order to guide the practical process, the influence of the dimension of micro-cantilever on them was also analyzed.

关 键 词：微悬臂梁 ANSYS 压电效应 有限元法 压电分析 模态分析 

分 类 号：TM282[一般工业技术—材料科学与工程] TP460.30[电气工程—电工理论与新技术]