四压电陶瓷管驱动的扫描台及有限元分析  

Finite Element Analysis on Scanner Based on Four Piezoelectric Tubes

作　　者：吴云良[1] 王克逸[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230027

出　　处：《压电与声光》2011年第4期594-596,601,共4页Piezoelectrics & Acoustooptics

摘　　要：基于单个压电陶瓷管可实现xyz三维微位移等优点和z向移动范围小等缺点,提出了一种由4个压电陶瓷管组合驱动的可实现三维微位移的扫描台,这种扫描台不仅能实现三维微位移,还扩大了z向移动范围。通过有限元分析软件ANSYS对其进行了力学分析,得出了xy方向移动范围为13μm,z移动范围为20μm,相比单个陶瓷管,z向移动范围增加很大;同时还得出了各种模态及z向位移的瞬态分析,通过给系统加入电阻尼有效改善了纳米位移台动态特性。As a single four quadrants piezoelectric tube has advantage of generating micro displacements in three dimensions as well as the disadvantage of small displacement in z dimension, a new type of scanner driven by four piezoelectric tubes is designed, which can generate larger displacements in three dimensions, especially the displacement in z dimension. The FEM software ANSYS is used to analyze the mechanics behavior of the scanner： the movement range of the scanner in xy dimension reaches 13 μm and in z dimension reaches 20 μm, which much larger than the single tube; modal analysis and transient dynamic analysis are proceeded and at last the improvement of the dynamic behavior is given with electrical damping.

关 键 词：压电陶瓷管 有限元分析 扫描台 ANSYS 扫描近场光学显微镜 

分 类 号：TH742[机械工程—光学工程]