提高激光光纤测量系统分辨力的方法  

Research on Improving the Resolution of Laser Optic Fiber Measuring System

作　　者：赵勇[1] 李鹏生[1] 马惠萍[1] 浦昭邦[1] 

机构地区：[1]哈尔滨工业大学,黑龙江哈尔滨150001

出　　处：《光电工程》1999年第5期27-30,共4页Opto-Electronic Engineering

基　　金：国防基金资助项目!(98J18.3.3HT0129)

摘　　要：简要介绍了激光光纤测试系统的测量原理，详细描述了激光器功率自动控制回路和用于微小内表面形貌检测的补偿式光纤传感器结构的设计方法，并给出了初步的实验结论。测量微小内尺寸时的定位分辨力为０．０５μｍ 。实验结果表明，本文所述的提高系统分辨力的方法设计合理。The measuring principle of laser optic fiber measuring system is simply introduced in the paper.The design method for the automatic control loop of laser power and the compensation type optic fiber sensor used for detecting the microin ternal surface topography are described in detail,the initial experimental conclusion is given.The positioning resolution for measuring micro internal size is 0.05μm.The experimental results show that the design method for improving the resolution is reasonable and has a strong adaptability.

关 键 词：激光 光纤测量系统 光纤传感器 分辨力 

分 类 号：TH74[机械工程—光学工程]