晶花传感器及其在大力值测量中的应用  

The Crystal Flower Transducer and Its Application to a Large Force Measurement

作　　者：张贻恭[1] 刘恩福[2] 

机构地区：[1]大连理工大学机械系,辽宁大连116024 [2]河北科技大学,河北石家庄050054

出　　处：《辽宁工学院学报》1999年第5期1-5,共5页Journal of Liaoning Institute of Technology(Natural Science Edition)

基　　金：国家自然科学基金

摘　　要：重点论述了一种新型传感器芯片 晶花芯片及由其构成的晶花传感器，探讨了从选晶、切割、非圆晶片、晶轴取向、晶花布阵、绝缘到布线等一系列问题，阐明转换基理和工艺过程，并给出几种典型芯片模式，以及它在大力值测量中的应用。The paper discusses a new type of chip used in a transducer, namely, a kind of crystal flower chip, including its componment of the crystal flower transducer. Besides, a series of problems are studied, such as the crystals selection, guart crystal cutting, non round crystal, direction of crystal axis, crystal flowers arrangement, insulation and wiring. Herefore, the transforming principle and the technical process are also expounded, with several typical chip models of crystal flowers as well as their application to the measurement of large force proposed.

关 键 词：晶花芯片 晶花传感器 大力值测量 压电石英晶体 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH823[自动化与计算机技术—控制科学与工程]