远紫外及真空紫外反射率测量的研究  

A study of reflectivity-measurement in far ultraviolet and vacuum ultraviolet

作　　者：庄大奎[1] 施懿范[1] 刘亚淑[1] 杨天立[1] 刘华[1] 

机构地区：[1]中国科学院上海光学精密机械研究所

出　　处：《光学学报》1989年第4期327-332,共6页Acta Optica Sinica

摘　　要：本文报道了一种采用成象式折叠腔测量真空紫外区域绝对反射率的方法,测量准确度为±5×10^(-3),精密度为±5×10^(-4).A new method for measuring reflectivity in the spectum of far ultraviolet and vacuum ultraviolet is described in this paper. The instrument designed features an optical system, a look-in amplifying detection technique in connexion with a data processing computer. The accuracy is better than ±5×10-3 and the precision better than ±5×10-4.

关 键 词：反射率 真空紫外 测量 远紫外 

分 类 号：O434.24[机械工程—光学工程]