Continuous Emission Spectrum Measurement for Electron Temperature Determination in Low-Temperature Collisional Plasmas  

作　　者：刘秋艳 李弘 陈志鹏 谢锦林 刘万东 

机构地区：[1]CAS Key Laboratory of Basic Plasma Physics,Department of Modern Physics,University of Science and Technology of China

出　　处：《Plasma Science and Technology》2011年第4期451-457,共7页等离子体科学和技术（英文版）

基　　金：supported by National Natural Science Foundation of China(Nos.10675121,10705028 and 10605025);National Basic Research Program of China(No.2008CB717800)

摘　　要：Continuous emission spectrum measurement is applied for the inconvenient diagnos- tics of low-temperature collisional plasmas. According to the physical mechanism of continuous emission, a simplified model is presented to analyze the spectrum in low temperature plasma. The validity of this model is discussed in a wide range of discharge parameters, including electron tem- perature and ionization degree. Through the simplified model, the continuous emission spectrum in a collisional argon internal inductively coupled plasma is experimentally measured to determine the electron temperature distribution for different gas pressures and radio-frequency powers. The inverse Abel transform is also applied for a better spatially resoluted results. Meanwhile, the result of the continuous emission spectrum measurement is compared to that of the electrostatic double probes, which indicates the effectiveness of this method.Continuous emission spectrum measurement is applied for the inconvenient diagnos- tics of low-temperature collisional plasmas. According to the physical mechanism of continuous emission, a simplified model is presented to analyze the spectrum in low temperature plasma. The validity of this model is discussed in a wide range of discharge parameters, including electron tem- perature and ionization degree. Through the simplified model, the continuous emission spectrum in a collisional argon internal inductively coupled plasma is experimentally measured to determine the electron temperature distribution for different gas pressures and radio-frequency powers. The inverse Abel transform is also applied for a better spatially resoluted results. Meanwhile, the result of the continuous emission spectrum measurement is compared to that of the electrostatic double probes, which indicates the effectiveness of this method.

关 键 词：continuous emission spectrum DIAGNOSTICS low-temperature plasma colli- sional plasma 

分 类 号：O53[理学—等离子体物理]