基于PDMS金属可调谐光栅的制备工艺研究  

Fabrication of Metal Tunable Gratings Based on PDMS

作　　者：顾艳妮[1] 宣艳[2] 

机构地区：[1]江苏科技大学物理教研室,张家港215600 [2]南京大学材料科学与工程系,南京210093

出　　处：《材料导报》2011年第16期27-29,47,共4页Materials Reports

摘　　要：分别利用直接法和间接法,制备了基于PDMS(聚二甲基硅氧烷)基底的金属可调谐光栅。由于在金属举离过程中PDMS遇丙酮溶液溶胀,导致直接法在机械调谐过程中光栅严重断裂,而利用间接法可以克服此问题。利用PDMS高弹性的特点,通过控制PDMS的纵、横向拉伸程度,对光栅周期进行连续、任意调谐,可获得预定的目标周期。The direct and indirect techniques were used to fabricate tunable metallic grating. The swelling of the PDMS（Polydimethylsiloxane） appeared in acetone in the lift-off step, leading to the cracking of the metallic grating in course of mechanical tuning the PDMS substrate. An indirect technique was applied in the experiment in order to avoid the swelling problem. Due to the high elastic property of the PDMS, the grating＇s spatial period could be continuously varied by mechanically stretching or compressing the PDMS.

关 键 词：PDMS(聚二甲基硅氧烷) 可调谐光栅 溶胀 机械调谐 

分 类 号：TB383[一般工业技术—材料科学与工程]