非接触法自动测量薄膜厚度  

Measurement the Thickness of a Thin Film by Automatic and Non-contact

作　　者：彭真真[1] 赵硕浛[1] 刘月林[1] 程匹克[1] 陈程[1] 

机构地区：[1]湖北师范学院,湖北黄石435002

出　　处：《大学物理实验》2011年第4期33-36,共4页Physical Experiment of College

摘　　要：根据白光等厚干涉原理,基于单片机改造的迈氏干涉仪用于自动测量透明薄膜厚度,采用非接触性测量法。当迈克尔逊干涉仪静镜形成的虚像与动镜相交所成的夹角很小时,在光屏上看到彩色干涉条纹,插入薄膜后,光程差改变,彩纹消失。步进电机带动微调手轮转动,当彩纹再次出现,即可得出透明薄膜厚度。According to the theory of equal thickness interference of white light,we have used the Michelson interferrometer reformed based on MCU to automatically measure the thickness of a transparent thin film,which is a non-contact method.When the angle between the virtual image of the static mirror and the dynamic mirror of the Michelson interferometer is very small,the colored interference fringes will appear.After inserting a thin film,the interference fringes disappear because the optical path difference changed.With rotating of the fine-tuning hand-wheel driven by stepping motor,the thickness of the thin film is measured when the interference fringes appears again.

关 键 词：单片机 白光 迈克尔逊干涉仪 薄膜厚度 非接触法 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]