Uneven splitting-ratio 1×2 multimode interference splitters based on silicon wire waveguides  

作　　者：周静涛 申华军 贾锐 刘焕明 汤益丹 杨成樾 薛春来 刘新宇 

机构地区：[1]Key Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics,Chinese Academy of Sciences [2]Institute of Semiconductors,Chinese Academy of Sciences

出　　处：《Chinese Optics Letters》2011年第8期83-85,共3页中国光学快报（英文版）

基　　金：supported in part by the National Natural Science Foundation of China (No. 60977050);the National "973" Program of China (Nos. 2009CB320302 and 2011CB301704)

摘　　要：Two types of 1×2 multi-mode interference （MMI） splitters with splitting ratios of 85：15 and 72：28 are designed. On the basis of a numerical simulation, an optimal length of the MMI section is obtained. Subsequently, the devices are fabricated and tested. The footprints of the rectangular MMI regions are only 3×18.2 and 3×14.3 （#m）. The minimum excess losses are 1.4 and 1.1 dB. The results of the test on the splitting ratios are consistent with designed values. The devices can be applied in ultra-compact photonic integrated circuits to realize the ＂tap＂ function.Two types of 1×2 multi-mode interference （MMI） splitters with splitting ratios of 85：15 and 72：28 are designed. On the basis of a numerical simulation, an optimal length of the MMI section is obtained. Subsequently, the devices are fabricated and tested. The footprints of the rectangular MMI regions are only 3×18.2 and 3×14.3 （#m）. The minimum excess losses are 1.4 and 1.1 dB. The results of the test on the splitting ratios are consistent with designed values. The devices can be applied in ultra-compact photonic integrated circuits to realize the ＂tap＂ function.

关 键 词：MMI multimode interference splitters based on silicon wire waveguides Uneven splitting-ratio 1 

分 类 号：TN256[电子电信—物理电子学] O562.1[理学—原子与分子物理]