柔性变栅距光栅角位移传感器的精度分析与工艺实现  

Precision analysis and process implementation of angular displacement sensor based on flexible varied line-space grating

作　　者：包艳[1,2] 杨德兴[1] 李秉实[2] 王东辉[2] 郑普超[2] 

机构地区：[1]西北工业大学理学院陕西省光信息技术重点实验室,陕西西安710072 [2]中国航天工业集团公司西安飞行自动控制研究所,陕西西安710065

出　　处：《光学精密工程》2011年第8期1859-1866,共8页Optics and Precision Engineering

基　　金：中航工业技术创新基金资助项目(No.2009D61864)

摘　　要：研制了用于采集和反馈飞机舵面位置信息的柔性变栅距光栅角位移传感器。分析了影响传感器精度的主要因素,给出了制备过程所采用的精密成型工艺。首先,根据柱面变栅距光栅在柔性变栅距光栅角位移传感器中的核心作用,介绍了传感器的工作原理;分析了工艺误差对传感器精度的影响,提出了柔性变栅距光栅精密成型为柱面变栅距光栅后内表面圆度应不大于0.01 mm。在圆度对传感器精度影响的量值基础上,采用了柱面变栅距光栅精密成型工艺。最后,利用有限元仿真分析了柱面变栅距光栅精密成型工艺的可行性。实验结果表明:柱面变栅距光栅内表面圆度达到0.004 3mm,传感器的线性度达到最大工作角度的0.27%,满足了航空机载传感器的精度要求。An angular displacement sensor based on a flexible varied-line-space grating was developed for the fly-by-light flight control system.The main factors effecting on the sensor precision and the process for sensor fabrication were discussed.Firstly,the principle of the sensor was introduced based on the key role of cylindrical varied-line-space grating played in the displacement sensor.Then,the effects of process errors on sensor precision were analyzed,and a conclusion was pointed out that the inner surface roundness of the cylindrical varied-line-space grating should be limited to be less than 0.01 mm when it was shaped from the flexible varied-line-space grating.According to analysis results,an accurate forming process was adopted,and its feasibility was conformed by ANSIS analysis.Experimental results show that the inner surface roundness of the sensor can be 0.004 3 mm,and the sensor linearity can be 0.27% of the full range.Obtained results meet the precision requirement of the aero-sensors.

关 键 词：柔性变栅距光栅 柱面变栅距光栅 角位移传感器 弹性凸模 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]