Love波传感器的分析与测试  

Analysis and measurement of Love wave sensor

作　　者：李正刚[1,2] 苗圃[1,2] 李锋[1] 吴一辉[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《传感器与微系统》2011年第9期143-145,152,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60871043)

摘　　要：为了制作出具有高灵敏度的Love波传感器,分析了Love波在ST石英和二氧化硅薄膜分层结构中的传播特性,并对该分层结构进行了相关的理论推导和计算。从该结构的声学动力学方程出发,分析求解了该分层结构的波动方程,并得到了在该分层结构的色散关系式和结构中的位移表达式。然后在所得到的解析表达式的基础上进行了相应的波结构分析和特性曲线的绘制,并得到了Love波在该结构中的传播特性。最后应用MEMS工艺制作了由ST石英为基底、二氧化硅为波导层的Love波传感器,并通过电化学微电铸的方法进行了实验验证,对理论灵敏度与实验灵敏度之间不一致的原因进行了分析。测试数据表明:该传感器的质量灵敏度为100 cm2/g,最低检出限为3.65 ng。实验结果基本满足Love波传感器进行高灵敏度生化检测的要求。In order to get the propagation characteristics of Love wave in the layered structure consists of ST- quartz and silica, and fabricate the Love wave biosensor with higher sensitivity, theoretical derivation and numerical computations have been achieved. The wave equations have been solved from the dynamic equations of the layered structure. The expressions of displacement field have been derived with the dispersion curve of the Love wave in this structure. Based on the analytical expressions which have been derived, the structures are analyzed and the characteristic curves of Love wave are drawn. The Love wave propagation features in laminar structure are also studied. According to the computing results with the structure, the Love wave sensor is fabricated with MEMS processes and is tested by the electro deposition experiment. The difference between theoretical sensitivity and experimental sensitivity are analyzed. The results indicate that the mass sensitivity of the device is 100 cm2/g and the detection limit is 3.65 ng. The demand for the high sensitive biochemical detection is basically satisfied.

关 键 词：LOVE波 色散曲线 质量灵敏度 循环伏安法 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]