Wavelength-selective switch based on a high fill-factor micromirror array  

作　　者：李四华 万助军 徐靜 钟少龙 吴亚明 

机构地区：[1]State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences [2]Graduate University of Chinese Academy of Sciences [3]College of Optoelectronic Science and Engineering,Huazhong University of Science and Technology

出　　处：《Chinese Optics Letters》2011年第9期5-7,共3页中国光学快报（英文版）

基　　金：supported by the National "863" Program of China (Nos. 2008AA03Z406 and 2009AA03 Z443);the National Natural Science Foundation of China (No. 60877066)

摘　　要：A novel design and fabrication approach for a high fill-factor micro-electro-mechanical system （MEMS） micromirror array-based wavelength-selective switch （WSS） is presented. The WSS is composed of a polarization-independent transmission grating and a high fill-factor micromirror array. The WSS is successfully demonstrated based on the fabricated high fill-factor micromirror array. Test results show that the polarization-dependent loss （PDL） is less than 0.3 dB and that the insertion loss （IL） of the wavelength channel is about -6 dB. The switching function between the two output ports of WSS is measured. The forward switching time is recorded to be about 0.5 ms, whereas the backward switching time is about 7 ms.A novel design and fabrication approach for a high fill-factor micro-electro-mechanical system （MEMS） micromirror array-based wavelength-selective switch （WSS） is presented. The WSS is composed of a polarization-independent transmission grating and a high fill-factor micromirror array. The WSS is successfully demonstrated based on the fabricated high fill-factor micromirror array. Test results show that the polarization-dependent loss （PDL） is less than 0.3 dB and that the insertion loss （IL） of the wavelength channel is about -6 dB. The switching function between the two output ports of WSS is measured. The forward switching time is recorded to be about 0.5 ms, whereas the backward switching time is about 7 ms.

关 键 词：Machine design Microelectromechanical devices Switching functions 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置] TN929.1[自动化与计算机技术—控制科学与工程]