Ultra-precision figuring using submerged jet polishing  

作　　者：施春燕 袁家虎 伍凡 万勇建 

机构地区：[1]Institute of Optics and Electronics,Chinese Academy of Sciences

出　　处：《Chinese Optics Letters》2011年第9期64-66,共3页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China under Grant No. 60808017

摘　　要：A new removal optimization method called submerged jet polishing （SJP） is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic （PV） 0.066 λ to 0.024 ）, （λ = 632.8 nm） after three iterations, and the root mean square （RMS） value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.A new removal optimization method called submerged jet polishing （SJP） is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic （PV） 0.066 λ to 0.024 ）, （λ = 632.8 nm） after three iterations, and the root mean square （RMS） value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.

关 键 词：Optical glass 

分 类 号：TP69[自动化与计算机技术—控制理论与控制工程]