激光诱导等离子体加工石英微通道的损伤模型  

Breakdown model of micro channels fabrication in fused silica substrates by laser-induced plasma

作　　者：李世雄[1] 白忠臣[1] 黄政[1] 张欣[1] 秦水介[1] 

机构地区：[1]贵州大学贵州省光电子技术及应用重点实验室,贵州贵阳550025

出　　处：《激光与红外》2011年第9期969-973,共5页Laser & Infrared

基　　金：贵州省社会发展攻关项目(No.黔科合SY[2010]3037号);贵州省科学技术基金项目(No.黔科合J字[2010]2103号);贵州大学研究生创新基金项目(No.校研理工2011004)资助

摘　　要：利用调Q的Nd∶YAG激光器输出的纳秒激光脉冲诱导等离子体加工石英微通道,加工深度可达4.2 mm,通道内壁光滑。本文对激光脉冲与物质相互作用的移动损伤模型进行了研究,建立了适用于纳秒激光脉冲诱导等离子体加工石英微通道的损伤模型,利用损伤模型分析了通道特点,模型结果与实验结果基本相符。A Q-switched Nd∶YAG laser is used to fabricate micro channels in a 1 cm3 fused silica substrate.The work is done by laser-induced plasma.The interior wall of the micro channels is smooth and the depth of the channels is up to 4.2 mm.The model of moving breakdown induced by laser pulses is set up and analyzed.The model can be used to predict the breakdown of micro channels fabricated by laser-induced plasma with nanosecond Nd∶YAG laser pulses.The model can also be used to analyze the channel characteristics.The model conforms to the experimental results well.

关 键 词：激光诱导等离子体 微通道 激光脉冲 损伤模型 

分 类 号：TN249[电子电信—物理电子学]