化学气相沉积硬质合金TiN/TiCN/Al_2O_3/TiN多层涂层的抗氧化性能  

Thermal oxidation resistance of TiN/TiCN/Al_2O_3/TiN multilayer coatings on cemented carbide by chemical vapor deposition

作　　者：陈响明[1,2] 易丹青[1] 黄道远[1] 李秀萍 刘会群[1] 吴春萍[1] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]株洲钻石切削刀具股份公司,株洲412007

出　　处：《中国有色金属学报》2011年第8期1967-1973,共7页The Chinese Journal of Nonferrous Metals

基　　金：科技重大专项资助项目(2009ZX04012-021)

摘　　要：对化学气相沉积（CVD）法制备的硬质合金TiN/TiCN/Al2O3/TiN多层涂层试样在600~950℃温度范围内进行了氧化质量增加试验,采用X射线衍射（XRD）和扫描电子显微镜（SEM）分析试样氧化前后相组成及微观组织。结果表明：复合涂层最外层为α-Al2O3时,涂层具有最佳的抗氧化能力;增加TiN/TiCN/κ-Al2O3/TiN复合涂层中TiCN和κ-Al2O3的厚度能大大提高涂层高温抗氧化性。TiN和TiCN涂层经600℃以上氧化后,产物均为金红石结构的TiO2,氧化后TiN/TiCN间的界面消失;经900℃以上氧化时,κ-Al2O3转变为α-Al2O3。The oxidation mass gain test at the temperature range of 650？950 ℃ in different times were carried out on the cemented carbide coated by multilayer TiN/TiCN/Al2O3/TiN coating prepared by chemical vapor deposition（CVD） method.The phase component and microstructure of coating samples were investigated by X-ray diffraction（XRD） and scanning electron microscopy（SEM）.The results show that,when the outset layer is α-Al2O3,the sample exhibits excellent oxidation resistance.The oxidation resistance of TiN/TiCN/κ-Al2O3/TiN multilayer coating sample is improved with the increase of the thickness of TiCN and κ-Al2O3.The oxidation product of TiN and TiCN layer is rutile TiO2 when the temperature is higher than 600 ℃,and the interface of TiN/TiCN disappears.The κ-Al2O3 transforms to α-Al2O3 when the oxidation temperature is above 900 ℃.

关 键 词：硬质合金 化学气相沉积多层涂层 抗氧化性 

分 类 号：TG135.5[一般工业技术—材料科学与工程] TG115.5[金属学及工艺—合金]