声表面波器件的快速精确模拟  

A fast rigorous simulation for surface acoustic wave devices

作　　者：柯亚兵[1] 李红浪[1] 何世堂[1] 

机构地区：[1]中国科学院声学研究所声学微机电系统实验室,北京100190

出　　处：《中国科学：物理学、力学、天文学》2011年第10期1210-1215,共6页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家自然科学基金资助项目(批准号:10834010;61071054;10774159)

摘　　要：该文提出了声表面波器件有限元/边界元(Finite Element Method/Boundary Element Method,FEM/BEM)模拟的快速计算方法.FEM/BEM方法作为一种全波分析方法,考虑了所有声波模式,能实现对声表面波器件的精确模拟,但FEM/BEM方法一般计算量大而难以实用,国内外已有工作围绕提高FEM/BEM法的计算速度展开.本文将在Ventura工作的基础上,优化占主要计算量的体波贡献.首先对固定的半无限长压电基片的格林函数用分段多项式函数近似,以避免复杂格林函数的反复计算,然后推导出近似后的积分之间的递推关系式,编写递推算法,并通过实例验证了递推算法能达到精度要求且提高了计算速度.最后采用优化后的FEM/BEM程序对一种纵向耦合(Double Mode Saw,DMS)滤波器进行模拟,模拟结果与实验结果吻合.A fast recursive algorithm is proposed to optimize the combined finite element method/boundary element method（FEM/BEM）,which is an accurate simulation tool for surface acoustic wave（SAW） devices but has the problem of time and resource consuming,which makes it unpractical.The work of this paper is based on Ventura＇s,and gives a method to optimize the computation of FEM/BEM method.Firstly the Green＇s function which is fixed for a type of substrate can be simplified by piecewise-polynomial approximation.Then a corresponding recursive process is deduced and a recursive algorithm is used.From an example the recursive algorithm is verified to be accurate and faster.Finally a DMS filter is simulated with its result agrees well with the result of experiment.

关 键 词：FEM/BEM 格林函数 递推算法 

分 类 号：TN65[电子电信—电路与系统]