电极结构对辉光放电着火电压的影响  

Influence of Electrode Structure on Breakdown Voltage of Glow Discharge

作　　者：陈洁[1] 武东博[1] 刘薇[1] 赵嘉功[1] 张涛[1] 

机构地区：[1]北京师范大学核科学与技术学院射线束技术与材料改性教育部重点实验室,北京100875

出　　处：《真空科学与技术学报》2011年第5期532-535,共4页Chinese Journal of Vacuum Science and Technology

基　　金：北京市科技新星计划(952870400);北京师范大学射线束技术与材料改性教育部重点实验室资助项目

摘　　要：用于微波传感的辉光管存在着火电压高的问题。本文研究了针形电极在几种电极结构下的辉光放电着火电压,电极结构分别为2针、3针和4针。在本实验的氩气压0.5～2.5 kPa范围内,几种电极结构下着火电压有明显的不同,在0.5kPa气压下着火电压差值最大(208 V)。进行了电场计算,根据计算结果简要分析了着火电压变化行为。本文说明:在不改变电极间距和不明显改变电极结构总体尺寸情况下,通过调整电极结构可以大幅度降低着火电压。着火电压的减小可以降低放电对电源的要求,便于实际应用。We addressed the influence of various factors,including the structures of the 2-,3-,and 4-needle electrodes,argon pressure and field distributions,on the glow discharge characteristics.The experimental results show that at a pressure ranging from 0.5 kPa to 2.5 kPa,the electrode geometry strongly affects the breakdown voltage in the glow discharge.For instance,at 0.5 kPa,the maximum difference between the three electrodes was found to be 208 V.The field distributions of the three electrodes were simulated to understand the impact of electrode structure on the breakdown voltage.We suggest that under the conditions of a fixed electrode-electrode separation,and a negligible change in its overall size,an optimization of the electrode geometry may significantly decrease the breakdown voltage.

关 键 词：等离子体物理 着火电压 辉光放电 电极结构 传感 

分 类 号：TN873.94[电子电信—信息与通信工程]