Ti-Mo吸气材料的性能特征研究  

Development and Characterization of Ti-Mo Getter Material

作　　者：张艳[1] 尉秀英[1] 毛昌辉[1] 李腾飞[1] 苑鹏[1] 杜军[1] 

机构地区：[1]北京有色金属研究总院先进电子材料研究所,北京100088

出　　处：《真空科学与技术学报》2011年第5期629-632,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：为了研究Ti-Mo吸气材料的性能特征,采用粉末冶金工艺制备了Ti-Mo7.5%(质量比)吸气材料。研究了该材料的结构特征,在不同激活温度、不同工作温度下的吸氢性能特征,对比了该材料对H2,N2,CO的吸收性能。结果表明,当激活温度从500℃提高到750℃时,多孔结构材料的室温吸气性能逐渐提高,但继续提高激活温度到800℃,性能基本维持恒定;工作温度越高,吸气性能越好,但作为一个特殊的性能特征,该材料的工作温度最好不要超过300℃;该材料具有优良的吸收H2,N2,CO性能,室温条件下对H2的吸收性能优于对N2和CO的吸收性能。A novel type of porous Ti-Mo 7.5%（wt） getter material were developed by powder metallurgy to evaluate the properties of bulk Ti-Mo getters.Its microstructures and pumping characteristics of various gases,including H2,N2,and Co,at different,activation and working temperatures,were characterized with X-ray diffraction,scanning electron microscopy and conventional surface probes.The impacts of powder metallurgy conditions on its microstructures were also studied.The results show that the activation and operating temperature strongly affect its gas absorption capacity.For instance,as the activation temperature rises up from 500 ℃ to 700 ℃,the gas absorption capacity of the porous getter at room temperature increases,but it remains unchanged when the activation temperature increases up to 800 ℃.Though its absorption linearly depends on its working temperature,a working temperature should be kept below 300 ℃ from safety considerations.The newly-developed getter absorbs H2 more effectively than N2 and CO.

关 键 词：吸气材料 粉末冶金 激活 吸气性能 

分 类 号：TB741[一般工业技术—材料科学与工程]