航天器氦质谱真空容器总漏率检测的灵敏度及可信度探讨  

Study on the minimum detectable leak rate and reliability of total leak rate detection of the vacuum container for spacecraft with HMSLD

作　　者：闫荣鑫[1] 洪晓鹏[1] 钟亮[1] 师立侠[1] 

机构地区：[1]北京卫星环境工程研究所,北京100094

出　　处：《真空》2011年第5期1-3,共3页Vacuum

摘　　要：依据航天器氦质谱真空容器总漏率检测原理,讨论了检漏仪和真空容器直接相连、同真空容器主真空泵并联、在前级泵和主真空泵间等连接方式,逐项研究了总漏率测试的最小可检漏率、反应时间,分析各种连接方式的应用特点,认为对大型航天器氦质谱真空容器检漏系统,检漏仪连接在前级泵和主泵之间可得到较好的灵敏度和反应时间。通过测量不确定度的分析与评定,确定一般航天器氦质谱真空容器总漏率检测的相对标准不确定度小于10%。Based on the principle of vacuum container leak detectipn with HMSLD （helium mass spectrometer leak detector）, the minimum detectable leak rate and the response time were studied for the three ways of leak detector connecting the vacuum container .The first way is leak detector connecting the vacuum container directly. The second way is leak detector and vacuum pump parallel connecting the vacuum container. The third way is leak detector linked between high vacuum pump and fore vacuum pump. The best way is the third way for big spacecraft leak detection which can get good balance between the minimum detectable leak rate and response time. The reliability of the vacuum container leak detection with HMSLD was valued. The relative standard uncertainty is less than 10%.

关 键 词：航天器 氦质谱 最小可检漏率 可信度 

分 类 号：TB773[一般工业技术—真空技术]