He-Ar潘宁过程对表面波等离子体柱功率的影响  

Influence of He-Ar Penning process on the power of SWP column

作　　者：李建[1,2] 王坤[1,2] 王世庆[1,2] 柳建[1,2] 徐灵飞[1,2] 孙乃峰[1,2] 

机构地区：[1]西南物理研究院,四川成都610041 [2]成都理工大学工程技术学院,四川乐山614007

出　　处：《真空》2011年第5期25-28,共4页Vacuum

基　　金：国家国防基础研究项目支持

摘　　要：由单极驱动的表面波等离子体(Surface-wave-sustained plasma,SWP)是近年发展起来的一种低气压、高密度等离子体,这种技术非常适用于等离子体天线等领域。本文介绍了一种简易实用的SWP源,研究了He-Ar组成的潘宁气体对于表面波等离子体柱的放电起始功率及维持功率的影响。测试了不同潘宁气体配比时的等离子体密度和等离子体温度。研究结果表明,应用合适配比的潘宁气体对于等离子体特性有很大影响,它可以有效地降低放电起始功率和放电维持功率,提高等离子体密度,等离子体温度略降低。A surface-wave sustained plasma （SWP） column was achieved by the L-C box which was designed by our group. The influence of the composition of He-Ar penning gases on the discharge properties, such as the initial discharge power, the maintaining power, was researched experimentally. The physical properties, including the electron temperature and ion density, were tested. The results showed that the application of penning gases in the SWP helps the reduction of the initial discharge power and maintaining power, the increasing of plasma density. The electron temperature will decrease in the penning gas discharge.

关 键 词：表面波等离子体 潘宁效应 静电双探针 

分 类 号：O484.5[理学—固体物理] O461.1[理学—物理]