平面全息光栅刻线密度的倍频式调整方法  

Method of Adjusting the Groove Density Spatial Frequency Multiplication of Plane Holographic Grating

作　　者：韩建[1,2] 巴音贺希格[1] 李文昊[1] 孔鹏[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100049

出　　处：《光学学报》2011年第10期31-36,共6页Acta Optica Sinica

基　　金：国家自然科学基金(60478034);"十一五"国家科技支撑计划重大项目(2006BAK03A02);吉林省科技发展计划项目(20070523和20086013)资助课题

摘　　要：刻线密度准确与否直接影响光栅色散及给定波长的衍射方向,进而影响光谱仪器结构设计。为了提高全息光栅刻线密度的制作精度,提出了平面全息光栅刻线密度的倍频式调整方法。将给定刻线密度的基准光栅放在干涉场曝光区域内,调节光束干涉角,干涉场曝光光束经基准光栅衍射后,根据调整光栅刻线密度的不同选择不同的衍射级次相互叠加形成莫尔条纹,以基准光栅刻线密度的倍数来确定待制作光栅的刻线密度。理论证明了基准光栅周期与光栅像周期之间存在倍数关系,指出了基准光栅刻线密度选择在倍频式调整方法中的等效规则,分析了基准光栅宽度不同对光栅刻线密度制作精度的影响。计算结果表明,当基准光栅宽度达到100mm时,制作300line/mm光栅其刻线密度误差小于1nm,刻线密度越大误差越小,故以基准光栅的刻线密度来确定待制作全息光栅刻线密度的倍频式调整方法能够满足全息光栅的制作要求。The precision of the groove density influence the dispersion and the diffraction of gratings and the configuration of the spectrograph.In order to improve the precision of the groove density of the plane holographic gratings,a method of adjusting the groove density spatial frequency multiplication of plane holographic grating is proposed.A reference grating with a specific groove density is set in the exposure area.Adjusting the interference angle,different orders of the two diffraction wavefronts match and form Moiré pattern at the screen in a special orientation.The groove desity multiple of the reference gratings can be obtained.The relation between the period of the reference grating and the interference fringe pattern is proved in theory.The equation regulation of the reference grating for groove density alignment is pointed out.The precision relation between the groove density of the interference fringe pattern and the width of the reference grating is also analyzed.The results indicate that the precision of the groove density of adjusting is less than 1 nm at the 100 mm width of the reference grating for 300 line/mm groove density alignment;the error decreases with increasing the width of the reference grating.The method of adjusting the groove density spatial frequency multiplication of plane holographic grating based on the groove density of the reference grating satisfies the fabrication requirement.

关 键 词：衍射与光栅 刻线密度 莫尔条纹 调整误差 

分 类 号：O433.4[机械工程—光学工程]