高峰值功率自准直脉冲Nd:YAG激光加工无锥度直孔研究  

Study on Producing Non-Tapered Holes with Adaptively Collimating High Peak Power Pulsed Nd:YAG Laser

作　　者：姜梦华[1] 李强[1] 雷訇[1] 王金国[1] 惠勇凌[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100124

出　　处：《中国激光》2011年第10期54-60,共7页Chinese Journal of Lasers

基　　金：国家自然科学基金(61040065);北京市自然科学基金(4112005)资助课题

摘　　要：利用改进的脉冲Nd：YAG激光器,对激光冲击打孔加工无锥度直孔进行了实验研究。在优化激光脉冲峰值功率和脉冲能量、辅助气压参数的基础上,通过比较实验证明,能量递增组合脉冲是实现无锥度直孔加工的有效方式,增加脉冲组合中脉冲的个数可加工出负锥度的孔;激光焦点位置是影响孔锥度的重要因素,焦点位于材料表面上方1.1~1.7 mm有利于减小锥度。在厚度为1.5,3.0 mm的镍基高温合金材料上,获得孔径分别为480,510μm的直孔,重复打孔孔径误差约30μm,孔锥度〈1%。给出了可实用于激光冲击打孔的直孔加工方法和脉冲激光器,并可用于其他材料的加工。Experiments of laser percussion drilling are carried out on nickel-based superalloy using a modified pulsed Nd：YAG laser.Peak power,pulse energy and assist gas pressure are optimized experimentally.Experimental results demonstrate that a pulse combination with increasing pulse energy is an effective method to produce non-tapered holes.Even negative taper holes can be produced through increasing the number of pulses in the pulse combination.Focal position is an important factor that affects the taper of holes,and 1.1~1.7 mm above the surface of the sample helps reducing the taper of holes.Non-tapered holes with diameter of 480 and 510 μm are drilled on nickel-based superalloy with thickness of 1.5 and 3.0 mm.Variation of hole diameter is about 30 μm,and hole taper is less than 1%.A feasible method of producing parallel holes and an applied Nd：YAG laser have been presented for laser percussion drilling,may also be used on other materials.

关 键 词：激光技术 激光冲击打孔 孔锥度 脉冲ND:YAG激光器 热效应 

分 类 号：TN249[电子电信—物理电子学]