基于弯曲板波的延迟线振荡器的ANSYS仿真  

ANSYS Simulation of the Flexural Plate Wave(FPW) Delay Line Oscillator

作　　者：胡晶[1,2,3] 温志渝[1,2,3] 陈李[1,2,3] 张祖伟[1,2,3] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044 [2]重庆大学国家新型微纳器件与系统技术重点学科实验室,重庆400044 [3]重庆大学微系统研究中心,重庆400044

出　　处：《微纳电子技术》2011年第10期664-668,共5页Micronanoelectronic Technology

摘　　要：针对复合板结构中弯曲板波谐振频率计算相对复杂的问题,建立并分析了基于弯曲板波延迟线振荡器的理论模型,计算得到A0(0阶反对称)模式板波的谐振频率为41 MHz;为了验证理论分析的结果,利用有限元软件ANSYS建立了基于弯曲板波的延迟线振荡器的3D有限元模型,并对其进行了谐响应分析以及瞬态动力学分析。谐响应分析得到A0模式的谐振频率为37.2 MHz,与理论计算结果的相对误差为9.3%;瞬态动力学分析得到A0模式的谐振频率为39.1 MHz,与理论计算结果的相对误差为4.6%。计算和仿真为基于弯曲板波的延迟线振荡器的结构设计提供了重要的依据。To the problem that the resonant frequency of the flexural plate wave （FPW） in the multiqayers structure was complicated to calculate, the theoretical model of the FPW delay line oscillator was established and analyzed. The resonant frequency of A0 （zero-step antisymmetry） mode is 41 MHz. In order to verify the result of the theoretical analysis, the 3D finite element model of the FPW delay line oscillator was established by using ANSYS, and the harmonic and transient analyses were performed. The resonant frequency of A0 mode are 37.2 MHz and 39.1 MHz by the harmonic and transient analyses, and the relative errors are 9.3% and 4.6% compared with the theoretical calculation result, respectively. The calculation and simulation provide significant supports for the structure design of FPW delay line oscillators.

关 键 词：延迟线振荡器 弯曲板波(FPW) ANSYS软件 3D模型 谐响应分析 

分 类 号：TH703[机械工程—仪器科学与技术] TN752[机械工程—精密仪器及机械]