柔性聚合物基材上三维纳米间隙的制作及互连  

Fabrication and Interconnection of 3D Nano-Gaps on Flexible Polymer Substrates

作　　者：李兴辉[1] Selvapraba Selvarasah Chia-Ling Chen Mehmet R.Dokmeci 

机构地区：[1]中国电子科技集团公司第十二研究所微波电真空器件国家级重点实验室,北京100016 [2]Department of Electrical and Computer Engineering,Northeastern University

出　　处：《微纳电子技术》2011年第10期674-678,共5页Micronanoelectronic Technology

摘　　要：利用普通的紫外光刻、等离子体刻蚀、剥离和薄膜技术,在生物和半导体技术兼容的柔性聚对二甲苯-C基材上制作出了三维纳米间隙结构。室温下,使用介质电泳的方法对制作的纳米间隙进行材料集成实验。在间距80 nm的间隙电极间,实现了碳纳米管的互连。I-V特性测试显示,互联后电极之间表现出了较好的线性导电特征。当使用的碳纳米管电泳液浓度为0.004 g/mL时,通过介质电泳方法得到连接于两电极间的碳管束的电阻约为13 kΩ。研究结果表明,这种柔性三维纳米间隙结构有望应用于柔性电子学、分子生物学和纳米材料科学等领域。The three dimension （3D） nano-gaps were fabricated on a flexible thin parylene-C substrate which was compatible to biological technology and semiconductor technology by the traditional ultraviolet lithography, plasma etching, lift off and thin film technology. The fabricated nano-gaps were carried out the nanomaterials assembly experiment by the dielectrophoretic method at room temperature. The single-walled carbon nanotubes （SWCNTs） bundles were assembled onto mieroelectrodes with a space of 80 nm. The I-V characteristic shows that the assembled SWCNTs exhibit better linear conductivity. When the concentration of the dielectro- phoresis solution is 0. 004 g/mL, the resistance of SWCNTs bundles connecting between the microelectrodes is 13 kΩ. These research results demonstrate the promise of the flexible 3D nanogaps in applications of flexible electronics, molecular biology and nano-material science.

关 键 词：柔性基材 纳米间隙 介质电泳 单壁碳纳米管 三维 聚对二甲苯 

分 类 号：TB383[一般工业技术—材料科学与工程]