新型航天红外组件寿命试验设备的真空系统设计  

A New Design of the Vacuum System for the Aging Tests of the Space Infrared Device

作　　者：曹岚[1,2] 杨波[1,2] 朱宪亮[1,2] 张海燕[1] 龚海梅[1] 

机构地区：[1]中国科学院上海技术物理研究所中国科学院红外成像材料与器件重点实验室,上海200083 [2]中国科学院研究生院,北京100039

出　　处：《科技导报》2011年第28期20-23,共4页Science & Technology Review

摘　　要：依据新型航天红外组件寿命试验设备的真空系统的技术要求,设计了具有两套抽气系统的全自动化高真空排气台,主真空系统以机械泵和分子泵作为前级泵,溅射离子泵作为主抽泵;辅助真空系统由机械泵和分子泵组成,用于主系统预抽。该真空系统采用计算机控制技术程控真空排气工艺,为多工位结构,具有全自动化的功能。根据理论计算分析,该设备能满足红外组件寿命试验对真空的要求。Based on the requirements of the vacuum system for the new aging tests of the space infrared device, this paper presents a design of a fully automatic high vacuum exhaust station with two sets of pumping system. One is the main vacuum system with a mechanical pump and a molecular pump as the backing pump and a sputter ion pump as the main pump; the other is the auxiliary vacuum system composed of a mechanical pump and a molecular pump, used for pre-pumping. With the computer control technology, this multi-station structure system enjoys automatic functions. The theoretical calculation analysis shows that this system can meet the vacuum requirements for the aging tests of the infrared device.

关 键 词：红外组件:寿命试验 真空 自动化 

分 类 号：V416.8[航空宇航科学与技术—航空宇航推进理论与工程]