CVD纳米金刚石涂层工具研究进展  

Research progress on chemical vapor deposition nanocrystalline diamond coating tools

作　　者：刘书军[1] 邓福铭[1] 赵晓凯[1] 陆绍悌[1] 卢学军[2] 

机构地区：[1]中国矿业大学(北京)超硬刀具材料研究所,北京100083 [2]北京迪蒙特佳工模具技术有限公司,北京100083

出　　处：《超硬材料工程》2011年第3期26-30,共5页Superhard Material Engineering

摘　　要：概述了CVD纳米金刚石涂层工具的研究开发现状、存在的主要问题,重点介绍了硬质合金基体表面预处理方法及纳米金刚石生长工艺参数对CVD纳米金刚石涂层工具结构和性能的影响。其中,介绍了硬质合金基体表面预处理方法主要有酸液浸蚀去钴、施加中间过渡层、机械或等离子体处理、负偏压等;纳米金刚石生长工艺参数则主要从碳源浓度、基体温度、反应气压三方面进行了介绍;最后,对CVD纳米金刚石涂层工具发展趋势和应用前景作出了展望。The development and main technical problems encountered in research of CVD nanocrystalline diamond coating tools were summarized.The influences of the surface pretreatment of cemented carbide inserts and growth process parameters of nanocrystalline diamond films on structure and performance of CVD nanocrystalline diamond coating tools are discussed in details.Among them,acid etching of cobalt,intermediate layer,mechanical or plasma treatment and negative bias on the surface pretreatment of cemented carbide inserts were mainly described,the carbon source concentration,substrate temperature and the reaction pressure on nanocrystalline diamond growth process were mainly described.At last,the development trends and application foreground are prospected.

关 键 词：化学气相沉积(CVD) 纳米金刚石涂层 硬质合金 预处理 

分 类 号：TQ164[化学工程—高温制品工业]