基于LVDT的光学器件相对位姿检测方法  

Relative position and attitude test method for optical elements utilizing LVDT

作　　者：马立[1,2] 欧阳航空[1] 荣伟彬[2] 何正峰[1] 孙立宁[2] 

机构地区：[1]上海大学机电工程与自动化学院,上海200072 [2]哈尔滨工业大学机器人技术与系统国家重点实验室,哈尔滨150080

出　　处：《仪器仪表学报》2011年第10期2324-2329,共6页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(50905105);机器人技术与系统国家重点实验室开放基金(SKLRS-2010-MS-02)资助项目

摘　　要：针对光学精密装配工艺特点,提出一种基于LVDT的三维相对位姿检测方法。采用4个对称分布的LVDT检测光学装配过程中球面镜与谐振腔体的位姿关系,根据LVDT的读数推导得出球面镜与谐振腔体的相对位姿。设计采用集成信号调理芯片AD598的LVDT处理电路作为位姿检测的控制系统,通过实验得出LVDT微位移检测的分辨率为0.1μm,重复检测精度为±0.3μm,并能较好地跟踪方波及正弦波信号。采用PID算法实现球面镜的快速位姿定位。实验结果表明:当球面镜的加工及安装误差在允许范围内时,位姿检测系统可以在25 s内完成球面镜相对于谐振腔体的位姿调整,最大距离误差为0.5μm,最大角度误差为8″,充分验证了基于LVDT相对位姿检测方法的可行性。A linear variable differential transformer（LVDT） is presented,which can measure 3 degree-of-freedom（DOF） position and attitude relations between a spherical mirror and a resonator in an optical assembly process.Four symmetrically distributed LVDT sensors are utilized to realize the position and attitude measurement.Position and attitude relations of the two optical elements are deduced according to the readings of the four LVDT sensors.A position and attitude test circuit is designed,which uses an integrated signal conditioning chip AD598.The design achieves a resolution of 0.1 μm and repeatability of ±0.3 μm.And the LVDT sensors can track sine wave signal and square wave signal well.A PID algorithm improves the efficiency of the optical assembly.Experimental results show that the test method can accomplish position and attitude adjustment in 25 seconds when the processing and installation error of the spherical mirror is controlled in an allowable range.The maximum distance error is 0.5μm and maximum angle error is 8＂,which verify the feasibility of the proposed method.

关 键 词：相对位姿检测 LVDT 光学装配 

分 类 号：TP206[自动化与计算机技术—检测技术与自动化装置]