等倾干涉法测量小孔径圆柱形腔特征长度  

Measurement of small radius cylindrical resonator length using equal inclination interference method

作　　者：张凯[1,2] 林鸿[2] 孙建平[2] 张金涛[2] 李晓苇[1] 

机构地区：[1]河北大学,保定071002 [2]中国计量科学研究院,北京100013

出　　处：《仪器仪表学报》2011年第10期2330-2335,共6页Chinese Journal of Scientific Instrument

基　　金：国家十一五支撑计划(2006BAF06B03)资助项目

摘　　要：激光等倾干涉法是一种准确度较高的测量Fabry-Perot腔形式圆柱腔长的方法。对于一些需要进行小孔径腔体长度测量的情况,采用等倾干涉法受到腔体孔径、激光发散角、入射角等各种条件的限制。基于激光等倾干涉原理,分析了腔体孔径、激光发散角和倾斜角,聚焦透镜等对等倾干涉测量的影响,并计算分析了图像采集感光芯片最小的感光范围。计算和实验验证结果表明:对于长度分别为65 mm、80 mm、130 mm和160 mm的圆柱共鸣腔,腔体光学孔径最小半径为2.13 mm;激光发散角不应小于0.8°;感光芯片的感光范围应大于5 mm;同时得到了激光倾斜角和发散角的对应关系。该分析为了用于定程圆柱声学共鸣法准确测量Boltzmann常数的需要,同时可以为小孔径Fabry-Perot腔测量提供一些参考。The laser equal inclination interference is a high precision method for measuring the length of Fabry-Perot cylindrical cavities.However,if the radii of the cavities in question are small,then there are limitations to the method.Such limiting factors include the inclination angle and divergence angle of the laser beam.This paper analyzes how the aforementioned factors,along with the converging lens,affect the measurement process,then provides a value for the sensing area of the image sensing chip.Experiment and calculation results indicate that for cylindrical cavities with lengths of 65 mm,80 mm,130 mm and 160 mm,the radii should be no smaller than 2.13 mm,the laser divergence angle should not be less than 0.8°,and the sensing area should be larger than 5 mm.The relation between divergence angle and inclination angle has also been determined.The analysis in this paper serves as preparation knowledge for the design of cylindrical resonators to be used for the measurement of the Boltzmann constant,as well as a reference for the methods used to measure small-radius cylindrical cavities such as the Fabry-Perot cavity.

关 键 词：计量学 等倾干涉 小孔径腔体 Fabry-Perot腔 精密测长 Boltzmann常数 

分 类 号：TB942[一般工业技术—计量学]