Novel sol-gel material for fabrication of a long period waveguide grating filter as a precise thermometer  

作　　者：WANG Xin LI XiaoChan ZHANG Tao HU CanDong ZHU QiuXiang CHEN SiHai LI Yun XU Jia HE Miao NIU QiaoLi ZHAO LingZhi LI ShuTi ZHANG Yong 

机构地区：[1]Key Laboratory of Electroluminescent Devices of Guangdong Provincial Education Department, Institute of Optoelectronic Materials ＆ Technology, South China Normal University, Guangzhou 510631, China [2]College of Information Science ＆ Engineering, Wuhan University of Science ＆ Technology, Wuhan 430081, China [3]Wuhan National Laboratory for Optoelectronics, Huazhong University of Science ＆ Technology, Wuhan 430074, China

出　　处：《Science China(Physics,Mechanics & Astronomy)》2011年第11期1967-1971,共5页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by the Natural Science Foundation of Guangdong Province,China (Grant Nos. 8251063101000007,10151063101000009 and 9451063101002082);the Scientific & Technological Plan of Guangdong Province (Grant Nos. 2008B010200004,2010B010600030 and 2009B011100003);the National Natural Science Foundation of China (Grant Nos. 61078046 and 10904042);the Key Project of Chinese Ministry of Education (Grant No. 210157);the Scientific & Technological Project of Education Department of Hubei Province (Grant No. D20101104);the Fundamental Research Funds for the Central Universities (Grant No. HUST 2010MS069);Program for New Century Excellent Talents in University,China (Grant No. 07-0319)

摘　　要：A new kind of organic-inorganic hybrid HfO2/SiO2 sol-gel material with a large thermo-optic coefficient and a wide linear tunable temperature range has been developed for fabrication of a long period waveguide grating （LPWG） filter, whose parameters were optimized and designed by using finite difference time domain （FDTD） simulations. The LPWG filter, a periodic rectangle-corrugated grating structure, was easily fabricated with soft-lithography technique. At a temperature range from 19~C to 70~C, the fabricated LPWG filter element demonstrated a high temperature sensitivity of about 6.5 nm/~C and a wide linear tunable temperature range of 51℃, so that it can be used as a precise thermometer. Our results are useful for the designs of LPWG filters for the implementation of a wide range of thermo-optic functions.A new kind of organic-inorganic hybrid HfO 2/SiO 2 sol-gel material with a large thermo-optic coefficient and a wide linear tunable temperature range has been developed for fabrication of a long period waveguide grating (LPWG) filter,whose parameters were optimized and designed by using finite difference time domain (FDTD) simulations.The LPWG filter,a periodic rectangle-corrugated grating structure,was easily fabricated with soft-lithography technique.At a temperature range from 19°C to 70°C,the fabricated LPWG filter element demonstrated a high temperature sensitivity of about 6.5 nm/°C and a wide linear tunable temperature range of 51°C,so that it can be used as a precise thermometer.Our results are useful for the designs of LPWG filters for the implementation of a wide range of thermo-optic functions.

关 键 词：LPWG filter SOFT-LITHOGRAPHY sol-gel material temperature sensitivity 

分 类 号：TN713[电子电信—电路与系统] TQ57[化学工程—精细化工]