一种高精度微电流测量放大器的研制  

Development of one kind of high-precision amplifier to measure micro current

作　　者：陈振生[1] 张玉林[2] 孙德芬[1] 王月[1] 

机构地区：[1]山东凯文科技职业学院电工电子实训中心,山东济南250200 [2]山东大学控制科学与工程学院,山东济南250061

出　　处：《电子设计工程》2011年第20期72-75,共4页Electronic Design Engineering

摘　　要：介绍了用于电子束曝光机束斑和束流测量的高精度电流/电压转换放大器。根据束流极其微弱这一特定情况,为了得到超低漂移、超低噪声和强抗干扰的高精度性能指标要求,采用了对称补偿电路设计方案,合理选用高精度集成电路作为电路的核心器件。为了加强抗干扰能力,对关键技术进行了针对性的有效处理。通过实际工作运行,证明效果良好工作可靠,满足了电子束曝光机束斑和束流的高精度测量要求。This paper presents the design and development of the high-precision amplifier which is used for the measurement of the electron-beam spot and current. In order to ensure uhralow-drift and uhralow-noise and stubborn aniti-disturbance to achieve ,this amplifier adopts the design scheme of the symmetry compensating circuit .In design of amplifier circuit, high- precision integrate circuits are reasonably used. In accordance with the technical requirement of stubborn aniti-disturbance, some key techniques have been properly handled. Through the test of the performance index and the practical usage, This measurement amplifier is proved to be satisfactory for the measurement amplification of the beam spot and the beam current.

关 键 词：束流和束斑 超低漂移 超低噪声 强抗干扰 高精度 

分 类 号：TN305.7[电子电信—物理电子学]