多阶柱状微电极加工模型及试验研究  

Theoretical and Experimental Research on Fabrication of Multiple Stepped Cylindrical Micro Electrode

作　　者：刘勇[1,2] 曾永彬[1] 余宏兵[1] 朱荻[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016 [2]山东大学力学与机电装备联合工程技术研究中心,威海264209

出　　处：《机械工程学报》2011年第17期164-171,共8页Journal of Mechanical Engineering

基　　金：国家自然科学基金(50635040);国家高技术研究发展计划(863计划;2009AA04Z302);江苏省自然科学基金(BK2008043)资助项目

摘　　要：为实现微电极的精确控制加工,对微细电极电化学刻蚀制备技术进行深入研究。针对单阶柱状电极的不足,分析多阶柱状微电极的加工原理及制备流程。针对分阶电极加工中的三种刻蚀状况,分析各段的刻蚀变化率,并由此推导出电极尺寸与形状控制函数。通过试验证实刻蚀过程中电流密度的不变性,讨论不同电流密度对电极直径的影响规律。通过试验归纳,建立加工电压、电流密度、浸入深度三者之间对应的函数关系,验证电极直径随时间呈线性变化的正确性。基于上述两组模型函数,建立多阶柱状微电极的加工控制模型,并对某三阶柱状微电极的形状及尺寸进行加工预测,实际加工结果显示,试验值与理论值具有很好的一致性。在加工控制模型的指导下成功制备出一批精度高的多阶柱状微电极。In order to achieve a high control accuracy of the cylindrical microelectrode processing,the electrochemical etching technology for fabrication of microelectrode is researched in depth.In view of various shortcomings of single-stepped cylindrical microelectrode,the machining principle and the processing flow of the multi-stepped cylindrical microelectrode are analyzed.According to the three distinguishable strands during the etching process,the etching variety for each stage of the microelectrode is studied through mathematical formula,based on which the size and shape control functions of micro electrode are established.The invariability of the current density during the etching process is confirmed by the experiments,and the influence of different current density on the electrodes diameters is discussed.Then,the corresponding functions among the voltage,current density and immersion depth are built by the experimental results reduction,and at the same time,the correctness of electrode diameter changing linearly with machining time is verified.Based on the above two models,the mathematical control model for fabricating the multi-stepped cylindrical microelectrode is set up.It proves that the experimental and theoretical values have a good agreement by the experiment of a third-stepped microelectrode.A set of different multi-stepped cylindrical microelectrodes are fabricated under the guidance of the control model.

关 键 词：微电极 柱状电极 多阶 电流密度 电极直径 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]