Dry electrode for the measurement of biopotential signals  

作　　者：WANG Yu PEI WeiHua GUO Kai GUI Qiang LI XiaoQian CHEN HongDa YANG JianHong 

机构地区：[1]Institute of Microelectronics, School of Physical Science and Technology, Lanzhou University Lanzhou 730000, China [2]State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Heijing 100083, China

出　　处：《Science China(Information Sciences)》2011年第11期2435-2442,共8页中国科学（信息科学）（英文版）

基　　金：supported by the National Natural Science Foundation of China (Grant Nos. 60776024,60877035,90820002);the National High Technology Research and Development Program of China (Grant Nos. 2007AA03Z427,2007AA04Z329,2007AA04Z254)

摘　　要：This paper introduces a kind of silicon-based dry electrode for measuring biological signals. It uses microneedle arrays to penetrate into the stratum corneum to reduce skin impedance. The dry electrode requires neither skin preparation nor the electrolytic gel, is easy to use and causes no skin allergy. Two different tech- nologies are chosen to manufacture microneedle arrays of dry electrode. One is deep dry etching combined with isotropic wet etching. The other is mechanical dicing combined with chemical wet etching （including isotropic wet etching and anisotropic wet etching）. Microneedle arrays are coated with metal and divided into 25 mm2 as dry electrode patch. Impedance testing shows that the impedance value of dry electrode can be comparable with that of commercial electrode in the 20 Hz-10 kHz frequency range. The steady-state visual evoked potential recording and analysis prove that the dry electrode can be used to detect electroencephalography.This paper introduces a kind of silicon-based dry electrode for measuring biological signals. It uses microneedle arrays to penetrate into the stratum corneum to reduce skin impedance. The dry electrode requires neither skin preparation nor the electrolytic gel, is easy to use and causes no skin allergy. Two different tech- nologies are chosen to manufacture microneedle arrays of dry electrode. One is deep dry etching combined with isotropic wet etching. The other is mechanical dicing combined with chemical wet etching （including isotropic wet etching and anisotropic wet etching）. Microneedle arrays are coated with metal and divided into 25 mm2 as dry electrode patch. Impedance testing shows that the impedance value of dry electrode can be comparable with that of commercial electrode in the 20 Hz-10 kHz frequency range. The steady-state visual evoked potential recording and analysis prove that the dry electrode can be used to detect electroencephalography.

关 键 词：dry electrode microneedle array dry etching wet etching EGG 

分 类 号：TN949.11[电子电信—信号与信息处理] TU528.571[电子电信—信息与通信工程]