溶胶-凝胶法制备V_2O_5薄膜经不同温度热处理后的微观结构  

Microstructure of V_2O_5 Thin Films Prepared by Sol-Gel Method and then Heat-treated with Different Temperatures

作　　者：彭雁[1] 詹肇麟[1] 

机构地区：[1]昆明理工大学材料科学与工程学院,昆明650093

出　　处：《机械工程材料》2011年第10期70-72,共3页Materials For Mechanical Engineering

摘　　要：以分析纯V2O5粉体为原料、H2O2为溶剂,采用电磁-超声波搅拌方式的无机溶剂-凝胶工艺,在ITO导电玻璃衬底上制备了V2O5薄膜;并研究了热处理温度对其形貌和结构的影响。结果表明:室温下V2O5薄膜为非晶无定形结构,400℃热处理后,薄膜中出现了β-V2O5相,450℃热处理后基本上全为β-V2O5相,500℃热处理后又出现了α-V2O5相;薄膜在350～400℃热处理后,表面较平滑、均匀,出现颗粒;450℃热处理后主要由瓣状、片状及短棒状多晶堆积而成;500℃热处理后主要由棒状多晶组成。Use V2O5 powders as raw materials and H2O2 as solvent, V2O5thin films were prepared on ITO conducting glass substrates by electromagnetism-ultrasonic-stirred inorganic sol-gel technology. The influence of the heat treatment temperature on the morphology and structure of V2O5 thin films was studied. The results show that the V205 thin film was amorphous structure crystal at room temperature, β-V2O5 phase appeared after heat treatment at 400℃, all were β-V2O5 phase when the heat treatment temperature was 450℃, and the α-V205 appeared again after 500 ℃. The surface of the thin film was smooth and homogeneous, and particles appeared after heat treatment at 350--400℃. The surface morphology after 450℃ were piled up by petaloid, sheet and short- elavate polycrystal, and which was made up by clavate polyerystal after 500℃.

关 键 词：V2O5薄膜 溶胶-凝胶法 电磁-超声波搅拌 

分 类 号：TQ135.1[化学工程—无机化工]