基于三角形分布光栅的相位测量轮廓术  

Phase Measuring Profilometry Based on Triangular Pattern Grating

作　　者：叶虹呐[1] 曹益平[1] 

机构地区：[1]四川大学光电科学技术系,四川成都610064

出　　处：《中国激光》2011年第11期224-228,共5页Chinese Journal of Lasers

基　　金：国家863计划(2007AA01Z333);国家重大专项(2009ZX02204-008);四川省学术和技术带头人培养基金(07GRC-01)资助课题

摘　　要：相位测量轮廓术凭借其高精度、非接触的优点在现代生活中受到了极大的重视,但其应用却受到正弦光栅复杂制作工艺的限制。根据相位测量轮廓术的基本原理,提出了基于三角形分布光栅的相位测量轮廓术。同正弦光栅相比,三角形分布光栅的制作工艺相对简单,更具有实用意义。对这两种方法的精度进行了比较和分析,并分别在无噪声的理想情况和有噪声的实际情况下,分析了光栅周期、条纹对比度以及物体最大高度对测量精度的影响。通过计算机模拟与实验表明,基于三角形分布光栅的相位测量轮廓术具有较高的精度和可行性。Phase measuring profilometry （PMP） has received great attention in modern life with the advantages of high accuracy and non-contact. However, the application of PMP is limited by the complicated manufacturing technique of sinusoidal grating. Based on the basic theory of PMP, the paper presents the PMP based on the triangular-pattern grating, which is of more practical significance because its manufacturing technique is easier compared to the sinusoidal grating. In this paper, the accuracy of the two methods mentioned above are compared and analyzed. At the same time, the influence of grating period and contrast ratio as well as the maximum height of different objects on the measuring accuracy is analyzed both in ideal and practical conditions. The computer simulations and experiments show that the PMP based on triangular-pattern grating is feasible for its high accuracy.

关 键 词：信息光学 光学三维传感 相位测量轮廓术 三角形分布条纹 光栅 相位展开 

分 类 号：TN247[电子电信—物理电子学]