热光源谱域光学相干层析成像系统  

Spectral-Domain Optical Coherence Tomography System with Thermal Light Source

作　　者：秦玉伟[1,2] 赵宏[1] 庄仲琴[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049 [2]渭南师范学院物理与电子工程系,陕西渭南714000

出　　处：《西安交通大学学报》2011年第11期68-71,共4页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目(50975228);陕西省教育厅资助项目(08JK282)

摘　　要：根据热光源具有极短的相干长度、能够提高系统的轴向分辨率的特点,设计了一种使用热光源的谱域光学相干层析成像系统.利用高斯函数计算得到的理想光谱密度与光谱仪测量的实际光谱密度之间的比值,得出了不同波长对应的光源光谱密度的校正系数,将校正系数与所测干涉光谱值相乘,得到了校正后的理想干涉光谱值.实验结果表明:高斯校正后,样品的一维散射势得到锐化,散射势峰值变大,系统的轴向分辨率变高;高斯校正后使二维层析图像的质量得到了提高,样品的薄膜边界变得清晰.因此,系统具有分辨率高、成像速度快、测量精度高和对样品无损伤的特点,在薄膜厚度的无损测量方面有着广泛的应用前景.A high resolution spectral-domain optical coherence tomography system with a thermal light source was introduced.The ratio of the ideal spectral density calculated with Gaussian function to the actual spectral density measured by spectrometer was used to obtain the calibration coefficient of different wavelength.The ideal interference spectrum after calibration was obtained once multiplying the coefficient by the measured interference spectrum.The experiment result shows that the one-dimensional scattering potential gets sharper,the peaks are heightened and the axial resolution of the system is improved by Gaussian calibration.In addition,the image quality is improved and the film boundary of the sample becomes clear.Thus,broadband thermal light source is suitable for high-resolution spectral-domain optical coherence tomography system.

关 键 词：光学相干层析成像 热光源 高斯校正 散射势 

分 类 号：TH744.3[机械工程—光学工程] O439[机械工程—仪器科学与技术]