利用有限元法的陶瓷压阻式传感器仿真分析与优化  

Simulating analysis and optimization of ceramic piezoresistive sensor base on FEM

作　　者：李结冻[1] 黄忠毅 毛磊[1] 

机构地区：[1]浙江大学机械系,杭州310027 [2]浙江毅力汽车空调有限公司,龙泉323700

出　　处：《现代制造工程》2011年第11期82-85,共4页Modern Manufacturing Engineering

摘　　要：阐述了陶瓷压阻式传感器的结构组成和工作原理。利用有限元ANSYS11.0软件对该陶瓷压阻式传感器进行仿真分析,分析结果表明,该陶瓷压阻式传感器线性度较低,灵敏度较差;随后对厚膜电阻布片位置和弹性膜片的径厚比进行优化,通过计算得出优化后陶瓷压阻式传感器的线性度提高0.23%,灵敏度提高20.5mV/MPa。这些分析为此类传感器的设计提供了理论依据。The principle and the corresponding structure of the new ceramic piezoresistive sensor are presented. The simulation analysis of the ceramic piezoresistive sensor are carried out by using software ANSYS11. 0. The results show that the linearity of the ceramic sensor is too low, meanwhile, the sensitivity is too poor. Then, the location of resistor and the ratio of radius and thickness are optimized. The results show that linearity increased by 0.23 % ,sensitivity increased 20.5mV/MPa. All these analyses provide a theoretical basis to design such sensor in theory.

关 键 词：陶瓷压阻式传感器 有限元 线性度 灵敏度 优化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]