用于光载毫米波系统的铌酸锂调制器的研制  

Design and Fabrication of LiNbO_3 Modulator for Radio over Fiber System

作　　者：吕敏[1,2] 华勇[1] 沈世奎[1] 孙雨南[1] 

机构地区：[1]北京理工大学光电学院,北京100081 [2]中央民族大学理学院,北京100081

出　　处：《北京理工大学学报》2011年第10期1223-1226,共4页Transactions of Beijing Institute of Technology

摘　　要：为了满足光载微波毫米波系统对宽带毫米波调制器的要求,设计和制作了双平行马赫曾德尔调制器(DPMZM).采用特殊电极结构,选择性腐蚀掉除火线电极下其余大部分SiO2缓冲层,有效抑制了调制器的热漂移和直流漂移.制作的DPMZM样品特征阻抗为35Ω,插入损耗为7.2dB,消光比为26dB,单、双臂半波电压分别为3.0V和1.5V,调制带宽为20GHz.除带宽指标外,总体性能与国际上高端产品相同或略优.目前尚未见铌酸锂DPMZM器件国内制作的报道.Radio over fiber （ROF） techniques could achieve ultra-wide wireless access and wired- line transmission of RF signal with high-capacity and low cost. The millimeter-wave modulator with wide bandwidth is the most important device in ROF system. This paper describes the design and manufacture process of the dual-parallel Mach-Zehnder modulator （DPMZM）. To reduce the direct current （DC） shift and thermal drift, a particular electrode structure has been chosen, which applies selective corrosion to strip off most part of SiO2 buffer except the SiO2 just under the hot electrode. The tested parameters of sample DPMZM are as follows. The characteristic impedance is 35 ~~, the insert loss is 7.2 dB, the extinction ratio is 26 dB, the half- wave voltage is 3.0 V when single arm is driving or 1.5 V when two arms are driving, and the modulate bandwidth is about 20 GHz. It is obvious that, except for the bandwidth, the performance of fabricated modulator has the manufactured in the international market. same （or higher） level as the high quality products The fabrication of LiNbO3 DPMZM has not been reported by the domestic organization so far.

关 键 词：集成光学 光载微波 铌酸锂 光波导 双平行马赫曾德尔调制器 

分 类 号：TN928[电子电信—通信与信息系统]