自扫描圆光栅数字测量系统原理及实验  

Principle and Experiment of Self-Scanning Circular Grating Digital Measurement System

作　　者：饶云江[1] 李平[1] 曾祥楷[1] 

机构地区：[1]重庆大学光电精密机械研究所

出　　处：《仪器仪表学报》1990年第1期72-76,共5页Chinese Journal of Scientific Instrument

摘　　要：本文提出了一种新的圆光栅测量系统——自扫描圆光栅数字测量系统。该测量系统由一自扫描光电二极管列阵及粗圆光栅所组成,用被细分的光敏元间距代替光栅姗距作为测量基准,从而可消除光栅栅距刻划误差而带来的测量误差,同时由于粗光栅的应用使系统的抗干扰能力大大提高,因而能解决目前计量圆光栅领域中普遍存在的精度与抗干扰能力及成本的矛盾。实验表明:该系统的测量分辨率较光栅栅距提高上百倍,具有现有计量圆光栅数字测量系统没有的许多优点。A new kind of circular grating measurement system—Self-Scanning Circulars(?)Grating Digital Measurement System is presented in thispaper.This new system consists of a self-scanning photodiode array(SSPD)and a coarse circular grating,and uses the divided span of SSPD as the mea-surement standard instead of the grating pitch so that the measurement errorcaused by the engraving error of the grating pitch can be eliminated.In thesame time,because of the use of the coarse grating the interference-insistingproperty of the grating system can be improved obviously.The new principlehas been proved to be efficient by the experiment carried out in this paper.

关 键 词：光栅 数字测量系统 原理 实验 

分 类 号：TH741.6[机械工程—光学工程]