三维触发式坐标测量机测头误差分析与性能实验  

Error Analysis and Performance Test of a Three-dimensional CMM Touch Trigger Probe

作　　者：丁邦宙[1] 费业泰[1] 夏豪杰[1] 刘芳芳[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《农业机械学报》2011年第11期228-230,213,共4页Transactions of the Chinese Society for Agricultural Machinery

基　　金：国家自然科学基金资助项目(50627501)

摘　　要：阐述了基于光纤布拉格光栅原理的三维触发式坐标测量机测头传感系统及控制箱设计方法,从机械结构、传感信号解调系统以及测量过程中逼近速度和逼近距离等几个角度分析了测头误差来源。根据测头的设计参数要求进行了测头的灵敏度、复位性和测力等性能实验,结果表明该测头单方向重复定位精度为20 nm,灵敏度为50 nm,测量力小于5 mN。A 3-D coordinate measuring machine（CMM） touch trigger probe based on fiber Bragg gratings was developed.The sensing system and the control box of the probe were described respectively.The error of the probe may arise from the mechanical structure,the sensing signal demodulation system,the measuring speed and the approaching distance during the process.Experiments showed that probe positioning accuracy in single direction could reach 20nm,sensitivity came up to 50nm and a measuring force was less than 5mN.

关 键 词：坐标测量机 光纤布拉格光栅 触发式测头 误差源分析 

分 类 号：TB96[机械工程—光学工程]