大直径单晶炉Cusp磁场设计与实现  

Design and Implementation of Cusp Magnetic Field of Large Diameter Single Crystal Furnace

作　　者：欧阳鹏根[1] 李伟[1] 张俊[1,2] 曹建伟[1,2] 邱敏秀[1,2] 

机构地区：[1]浙江大学流体传动及控制国家重点实验室,杭州310027 [2]上虞晶盛机电有限公司,上虞312300

出　　处：《机械科学与技术》2011年第11期1827-1831,共5页Mechanical Science and Technology for Aerospace Engineering

摘　　要：随着硅单晶材料向着大直径、高性能方向发展,通过施加Cusp磁场来提高材料质量成为研究趋势。但目前大直径单晶炉Cusp磁场存在功耗大、加工难等缺点。针对这些问题,提出一种实心螺线管式的磁场线圈结构及线圈外部冷却方式,然后以TDR130型单晶炉(32吋坩埚)为例,通过有限元分析法对其Cusp磁场分布、线圈匝数、间距等参数进行了数值模拟及分析,并根据模拟分析结果对磁场结构进行了优化及设计。实验结果表明:数值模拟结果与实测值较好地吻合,同时这种Cusp磁场线圈结构形式及冷却方式能够满足单晶炉的生产要求,功耗降低20%以上。As the single crystal silicon material tends to be of large diameter and high performance,there is an urgent need to study how to apply the Cusp magnetic field to a single crystal furnace.But its Cusp magnetic field has the drawbacks of high power consumption and difficulty of processing.To address these problems,we put forward a new coil structure with magnetic field and an external cooling method.Taking the TDR130 Type single crystal furnace（32-inch crucible） as example,we simulate its design parameters such as Cusp magnetic field distribution,coil turn and range and then analyze them with the finite element method.With the analysis results,we optimize and design its magnetic field structure.The test results indicate that the design parameters of the Cusp magnetic field of the single crystal furnace can meet the requirements for its manufacture and that its power consumption is reduced by 20%.

关 键 词：单晶炉 Cusp磁场 有限元 功耗 

分 类 号：TB24[一般工业技术—工程设计测绘] O78[理学—晶体学]