利用光学付里叶变换测量表面粗糙度  

The Measurment of Surface Roughness Using Optical Fourier Transform

作　　者：张卫[1] 赵焕卿[1] 唐毓礼 秦永鑫 

机构地区：[1]复旦大学物理系 [2]上海纺织工业专科学校

出　　处：《应用激光》1990年第1期4-8,共5页Applied Laser

摘　　要：本文提出了利用光功率谱计算该自相关函数及均方根粗糙度的测量方法,对于高度光洁的表面,模似计算与理论分析的结果充分一致。此外,本文还给出了利用线阵 CCD 光电探测器对▽12,▽11,▽10三种表面光洁度比较样板进行测量的实验结果。This paper discusses the possibility of directly measuring surface roughness by op-tical Fourier transform therom and presents an expression that relates the 2-D self-correlationfunction and its optical power spectrum.On this basis,an formula by which the self-correlationfunction can be directly caculated through its optical power spectrum is given.The results of co-mputer simulation prove that the complete self-correlation function describing the important stati-stical character of(?)rough surface can be gotten by the formula in some conditions,at the sametime,the root mean square roughness and correlation length are determined.At.last,this papergives the experiment results for three grinding metallic samples 12,11,10.

关 键 词：表面粗糙度 测量 光学 付里叶变换 

分 类 号：TH741.3[机械工程—光学工程]