光学材料亚表面损伤深度破坏性测量技术的实验研究  

Experiment Study on the Destructive Measurement of the Depth of SSD for Optical Material

作　　者：李改灵[1] 吴宇列[1] 王卓[1] 李圣怡[1] 

机构地区：[1]国防科学技术大学,长沙410073

出　　处：《航空精密制造技术》2006年第6期19-22,共4页Aviation Precision Manufacturing Technology

基　　金：国家自然科学基金资助项目(编号50375156)

摘　　要：基于差动原理对HF酸恒定化学蚀刻速率法进行改进,以降低环境(温度、HF酸浓度等)变化对测量结果的影响,从而提高测量效率和测量准确性。并将在新方法测量实验后的结果与理论估计值进行了比较分析。Constancy of chemical etch rate method was modified so as to reduce the influencing factors such as temperature and concentration of HF acid.The efficiency and accuracy are improved.The modified method was used to measure the SSD.The experimental results were compared with the theoretical value and the differences were analyzed.

关 键 词：光学材料 HF恒定化学蚀刻速率 差动法 亚表面损伤 

分 类 号：TH161.2[机械工程—机械制造及自动化]