超精密机械加工技术在微光学元件制造中的应用  

Application of Ultra Precision Machining to the Manufacture of Micro- optical Components

作　　者：杨元华[1] 陈时锦[1] 程凯[1] 孙西芝[1] 

机构地区：[1]哈尔滨工业大学机电学院精密工程研究所,哈尔滨150001

出　　处：《航空精密制造技术》2005年第4期10-12,共3页Aviation Precision Manufacturing Technology

摘　　要：超精密机械加工技术作为微光学元件的一种制造方法,具有很多其他传统方法所不具有的优点。本文回顾了超精密机械加工技术的发展,展望了其在微光学元件加工中的应用潜力。Precision machining, as a manufacturing technique of micro- optical components, has many advantages which are difficult or even impossible for other traditional methods. The history of ultra precision machining technology is reviewed. The potential application and development on the manufacture of micro- optical components are prospected.

关 键 词：超精密加工 微光学 

分 类 号：TG506[金属学及工艺—金属切削加工及机床]