控制力超精密研抛测控系统  

Force-controlled System for Ultra-precision Lapping and Polishing

作　　者：史兴宽[1] 仝猛[1] 徐传义[1] 

机构地区：[1]西北工业大学精密超精密加工技术研究室,西安710022

出　　处：《航空精密制造技术》2000年第1期13-16,共4页Aviation Precision Manufacturing Technology

摘　　要：简要介绍超精密抛光技术的发展动态，围绕精密研抛机的现有加工技术水平，开发可实现越精密抛光的控制力系统。In this paper, the developments in ultra-precision polishing technology have been discussed and in- troduced. Based on the existing machining capability of precision lapping and polishing machinery, the force-controlled system for ultra-precision polishing of optical plate substrate with smooth surface has been developed.

关 键 词：控制力 超精密加工 研抛加工 

分 类 号：TH706[机械工程—仪器科学与技术]