将激光与STM联用进行电化学微（纳）米材料加工的新方法  

A Combined Technique of Laser and STM for Electrochemical Micro- (Nano-)fabrication

作　　者：任斌[1] 高劲松[1] 陈捷光[1] 田中群[1] 

机构地区：[1]厦门大学固体表面物理化学国家重点实验室

出　　处：《仪器仪表学报》1996年第S1期196-198,共3页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金委优秀中青年人才基金;国家教委跨世纪人才基金

摘　　要：利用Ｒａｍａｎ—ＳＴＭ联用系统引人激光配合ＳＴＭ开展电化学纳米材料加工．该方法的特点为它不仅可进行纳米加工，还可立即进行原位测量所加工的材料的形貌及结构，继而原位改进加工条件。A novel technique of the combination of laser and STM is introduced to micro-- and nano--fabrication in an electrochemical cell. Both the STM tip and the incident lllser can be utilized to induce electrodeposition and electro-polymerization at nano-or microscale on electrode surfaces. This technique can be applied further as a multiple tool for fabrication and in--situ measurement, i. e. both the topography and structure of the pattern just fabricated can be measured in--situ without changing electrochemical condition.

关 键 词：材料加工 电化学体系 激光 原位测量 纳米加工 自聚焦透镜 跨世纪人才 联用系统 国家自然科学基金 加工条件 

分 类 号：TN305[电子电信—物理电子学]